On September 26, 2024, the Forum on the Collaborative Development of Manufacturing Processes and the Semiconductor Equipment Industry Chain was held at the Wuxi Taihu International Expo Center. Mr. Zhang Ting, Director of Supply Chain Management at Shanghai Jita Semiconductor Co., Ltd., delivered a special report titled "New Progress in the Localization of Semiconductor Manufacturing Supply Chains."

As a leading research and manufacturing base for specialized processes, Jita Semiconductor serves as a key player in the application of domestic equipment and materials. The localization rates for equipment and materials are among the highest in the country, with over 50% of newly procured equipment being sourced from domestic suppliers in 2023.

With the increasingly tense international situation, the challenges to the safety of the domestic semiconductor manufacturing supply chain are significant. Although the variety of domestically produced materials being introduced into production is growing, improvements are needed in terms of quality stability and performance consistency between batches, as core formulations and raw materials still rely on foreign sources.

In terms of specialty gases and chemicals, Jita Semiconductor has a total demand for 36 types of specialty gases, with an urgent need for domestically produced specialty gases including 3MS, C5F8, and SbF5. The total demand for chemicals is 128 types, with urgently needed domestically produced products including Polyimide and copper plating solution additives.

Electronic-grade Trimethylsilane (3MS) is used in the semiconductor industry as a precursor for depositing silicon carbon nitride and silicon carbide films, primarily for depositing low dielectric constant copper diffusion barrier layers or etch stop layers.

High-purity Octafluorocyclopentene (C5F8) is widely used in the etching process during semiconductor device manufacturing, particularly for etching with size and selectivity for the smallest geometric features (such as the width of interconnects, contacts, trenches, etc.).

Antimony pentafluoride (SbF5) is a new type of gas doping source used in power electronics, also referred to as a 'gas-like' source. Although it is a liquid, it functions similarly to a gas.

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